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Repairs

AMATSemi is constantly expanding our repair offerings with our strategic
partnerships and network of resources.

On-Tool Verification

Controllers, PCBs, Power Supplies, Drivers

Tool repair options are traditionally limited to repairs performed by OEMs and Second Sources who cannot offer true testing of the repaired part on the tool for which they were designed or adapted. AMATSemi can repair, test, and validate a number of parts on Original Equipment to ensure that repairs are 100% correct and guaranteed.

AMAT P5000 Centura Endura
  • Synergy V452
  • Video PCB
DNS 80A 80B SK-200
  • CESP-0017 Maintenance Panel
  • EEKA-001 8-Axis Motor Driver
  • EEUE-001 EEW Assembly
  • EEYC-001 Station Controller
  • System PCBs
  • Servo AMPs
  • Power Supplies
  • LCD Monitors
GASONICS L3510 PEP-3510
  • 16495-01 I/O Interface PCB
  • 001-1070-02 Brooks Z-bot Robot Interface PCB
  • 95-0537 Gas Box Controller (mini)
  • 95-0547 Microwave Controller (mini)
  • 95-3157 Misc. Controller (mini)
  • LCD Monitor (replaces obsolete LCD)
  • CPU/Hard Drive Upgrade (replaces hard drive with Dual Raid or CF card)
KLA-TENCOR 8100 8200 8300 CD SEM
  • 880-50510 Electron Source Refurbishment
  • Installation, field-service and warranty
  • 780-13204-000 Schottky Gun Controller
  • 780-13183-000 TFE Gun Controller
  • 720-06139-001 ETDC Controller
  • 780-14688-000 Wien Filter Controller
  • Column Control Chassis
  • X-Y Motors
  • Lasers
NOVELLUS C-1
  • 19-00128-01 CPU PCB (slot 2)
  • 19-00130-00 Serial I/O Daughter PCB
  • 19-00122-00 RAM PCB (slot 3)
  • 19-00157-00 Digital I/O PCB (slot 4-5)
  • 19-00126-00 Analog Input PCB (slot 6)
  • 19-00136-00 Analog Output PCB (slot 7-8)
  • 19-00123-00 Motor Indexer PCB (slot 10-12)
  • 02-00150-00 Multibus Power Dist. PCB
PROMETRIX RS-35 RS-55 RS-75
  • 54-0006 Analog Relay PCB
  • 54-0014 DVM PCB
  • 54-0005 Current Supply PCB
  • 54-0057 Power Supply PCB
  • 54-0046 Motor Controller PCB
  • 54-0049 Parallel I/O PCB
  • 54-0252 Analog I/O Temp PCB
  • 53-0001 CPU RSXX PCB
RF GENERATOR TESTING
  • AE APEX, MDX, PDX, RFG
  • ENI OEM-12, OEM-25, OEM-28

Don't See Your Tool?

AMATSemi is constantly expanding our repair offerings with our strategic partnerships and network of resources. Contact us for more information on ALL of our internal repair services.

Contact Us