OEMs
We make it easy to find the specific part from a specific OEM.
Search our inventory by OEM.
Offering Quality OEM Spare Parts
Original Parts are Better
AMATSemi carries spare parts from over 1500 different Original Equipment Manufacturers—from the most common to the less popular, that are still essential to keep your operation running. Putting in true OEM parts makes a difference in equipment reliability, performance, and maintenance. By offering new, like-new, used, and repaired parts, AMATSemi has a solution for you at a
fraction of the OEM price.
Can't Find it
We have the industry knowledge, a network of resources, and a robust inventory system to find the parts you need. Send us an inquiry on what you are looking for and let us do the groundwork for you.
A Sampling of Equipment Supported
| OEM | Primary Platform | Secondary Platform | Repairs Offered |
| Applied Materials (AMAT) |
| Yes | |
| ASYST |
| ||
| AXCELIS |
| ||
| ASYST |
| ||
| Brooks Automation |
| PRI/Equipe ESC 200 ESC 212 | |
| CANON |
| ||
| DNS |
| Yes | |
| KLA (TENCOR) |
| THERMAWAVE 2600/32XY/52XX | Yes |
| LAM |
| ||
| Novellus |
| Yes | |
| SEZ |
| ||
| SVG - RITE TRACK |
| Yes | |
| Tokyo Electron (TEL) |
| Yes | |
| TRIKON |
| ||
| VARIAN |
|