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OEMs

We make it easy to find the specific part from a specific OEM. Search our inventory by OEM.

Offering Quality OEM Spare Parts

Original Parts are Better

AMATSemi carries spare parts from over 1500 different Original Equipment Manufacturers—from the most common to the less popular, that are still essential to keep your operation running. Putting in true OEM parts makes a difference in equipment reliability, performance, and maintenance. By offering new, like-new, used, and repaired parts, AMATSemi has a solution for you at a fraction of the OEM price.

Can't Find it

We have the industry knowledge, a network of resources, and a robust inventory system to find the parts you need. Send us an inquiry on what you are looking for and let us do the groundwork for you.

A Sampling of Equipment Supported

OEMPrimary PlatformSecondary PlatformRepairs Offered
Applied Materials (AMAT)
  • Endura
  • P5000
  • Centura
  • Mirra-Mesa
  • 8330
Yes
ASYST
  • SMIF Handlers (Small)
  • SMIF Handlers(Bolt On Uprights)
  • CPU Cards
  • Grippers
  • Loaders
AXCELIS
  • GSD
  • GSD HE
  • NOVA 10-180
  • EATON 6200
  • EATON 8200/8250
  • FUSION
ASYST
  • SMIF Handlers (Small)
  • SMIF Handlers(Bolt On Uprights)
  • CPU Cards
  • Grippers
  • Loaders
Brooks Automation
  • MAG 7
  • MAG 8
  • Adtran 5
  • Robot Arms
  • Wafer Orienter
  • Controllers
PRI/Equipe
ESC 200
ESC 212
CANON
  • I3/I4/I5
  • Optics
  • Reticle Library
  • PCBs
  • Power Supplies
DNS
  • 60A
  • 60B
  • 80A
  • 80B
  • SK200
  • SK2000
Yes
KLA (TENCOR)
  • UV1050
  • UV1250
  • 8100 (XP,NT, MAC)
  • AIT
  • AIT II
THERMAWAVE
2600/32XY/52XX
Yes
LAM
  • Rainbow 4400/4500
  • Alliance
  • TCP 9400/9600
  • 2300 Versys
Novellus
  • Concept 1
  • RF Power Supplies
  • RF Match
  • Spares
  • Robots
Yes
SEZ
  • Spares
SVG - RITE TRACK
  • 90X series
  • 80X series
Yes
Tokyo Electron (TEL)
  • ACT 8
  • ACT 12
  • WEE Units
  • Catch Cups
  • Robots
  • Valves
Yes
TRIKON
  • Shields
  • RF Lid Assemblies
  • WEE Units
  • Catch Cups
  • Robots
  • Valves
VARIAN
  • e500
  • e200
  • e220
  • ViiSTA